Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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= Spin dryers = | |||
[[image:spin-rinser-dryer-white.jpg|200x200px|right|thumb|Image(s) of the equipment(s)]] | [[image:spin-rinser-dryer-white.jpg|200x200px|right|thumb|Image(s) of the equipment(s)]] | ||
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'''The user manual, technical information, and contact information can be found in LabManager: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=156 Spin dryer 1] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=157 Spin dryer 2] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=158 Spin dryer 3] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=256 Spindryer 4 (4",6")]''' | '''The user manual, technical information, and contact information can be found in LabManager: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=156 Spin dryer 1] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=157 Spin dryer 2] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=158 Spin dryer 3] [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=256 Spindryer 4 (4",6")]''' | ||
= Single Wafers Spin Dryers = | |||
== Process information == | == Process information == | ||