Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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|style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b> | |style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 4</b> | |style="background:WhiteSmoke; color:black"|<b>Spin dryer 4</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Single Wafer Spin dryer 1</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Single Wafer Spin dryer 2</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Single Wafer Spin dryer 3</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Critical point dryer</b> | |style="background:WhiteSmoke; color:black"|<b>Critical point dryer</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Ethanol fume dryer</b> | |style="background:WhiteSmoke; color:black"|<b>Ethanol fume dryer</b> | ||
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*E-5 | *E-5 | ||
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*B-1 | |||
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*C-1 | |||
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*D-3 | |||
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*D-3 | *D-3 | ||
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*Drying | *Drying | ||
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*Drying | |||
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*Drying | |||
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*Drying | |||
*Rinsing + drying | |||
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*Drying | *Drying | ||
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*Drying | *Drying | ||
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*Drying sensitive samples. E.g. with cantilevers | *Drying sensitive samples. E.g. with cantilevers | ||
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*1-25 150 mm wafers | *1-25 150 mm wafers | ||
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* | *1-25 50 mm wafers | ||
*1-25 100 mm wafers | *1-25 100 mm wafers | ||
*1-25 150 mm wafers | *1-25 150 mm wafers | ||
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*one 100 mm wafer | |||
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*one 100 mm wafer | |||
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*one 100 mm wafer | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*1 to 5 wafers per run. Sizes: 2”, 4" or 6" | *1 to 5 wafers per run. Sizes: 2”, 4" or 6" | ||
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*Only for RCA cleaned wafers | *Only for RCA cleaned wafers | ||
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*No restrictions | |||
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*No restrictions | |||
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*No restrictions | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*No restrictions | *No restrictions | ||