Specific Process Knowledge/Lithography/Baking: Difference between revisions
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Variable temperature convection oven mostly used for baking of wafers as a hard baking step after development of photoresist. | Variable temperature convection oven mostly used for baking of wafers as a hard baking step after development of photoresist. | ||
The set-point can be varied, but should always be returned to | The set-point can be varied, but should always be returned to 110°C after use. | ||
'''The user manual, and contact information can be found in LabManager: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=119 Oven: 120C - 250C]''' | '''The user manual, and contact information can be found in LabManager: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=119 Oven: 120C - 250C]''' | ||