Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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*Wet oxide with O2 and H2 can be grown in furnace:A1,A3. | *Wet oxide with O2 and H2 can be grown in furnace:A1,A3. | ||
*Wet oxide with H2O in a bobler can be grown in furnaces:C1,C2,C3. | *Wet oxide with H2O in a bobler can be grown in furnaces:C1,C2,C3. | ||
==Comparing the six oxidation furnaces== | ==Comparing the six oxidation furnaces== | ||