Specific Process Knowledge: Difference between revisions
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!Materials | !Materials | ||
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|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]] | |rowspan="5" valign="top"|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]] | ||
|Polymer Injection molding | |Polymer Injection molding | ||
| | |TOPAS | ||
TOPAS | |||
|- | |- | ||
| | |LASER micro machining | ||
|Silicon, Metal, Graphene (on silicon), Glass (Pyrex, fused silica), TOPAS, PMMA | |||
LASER micro machining | |||
| | |||
Silicon, Metal, Graphene (on silicon), Glass (Pyrex, fused silica), TOPAS, PMMA | |||
|- | |- | ||
| | |Dicing saw | ||
|Silicon, Glass (Pyrex, fused silica) | |||
Dicing saw | |||
| | |||
Silicon, Glass (Pyrex, fused silica) | |||
|- | |- | ||
|[[Specific Process Knowledge/Imprinting|Imprinting]] | |[[Specific Process Knowledge/Imprinting|Imprinting]] | ||
| | |TOPAS, PMMA | ||
TOPAS, PMMA | |||
|- | |- | ||
|[[Specific Process Knowledge/Lithography|Lithography]] | |[[Specific Process Knowledge/Lithography|Lithography definition]] | ||
| | |SU8, AZ resists | ||
SU8, AZ resists | |||
|- | |- | ||
|} | |} | ||