Jump to content

Specific Process Knowledge/Lithography/Baking: Difference between revisions

← Older editNewer edit →
VisualWikitext
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Line 155: Line 155:
<br clear="all" />
<br clear="all" />


==Fumehood hotplates==   
==Fume hood hotplates==   
Variable temperature hotplate mostly used for baking of single wafers as a soft baking step after a spin coating of photoresist.
Variable temperature hotplate mostly used for baking of single wafers as a soft baking step after a spin coating of photoresist.
<br clear="all" />
<br clear="all" />


<gallery caption="Fumehood hotplates" widths="220px" heights="225px" perrow="5">  
<gallery caption="Fumehood hotplates" widths="220px" heights="225px" perrow="5">  
image:FumehoodHotplate in C-1.jpg|Fumehood hotplate for [[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spinner_.28Polymers.29|Manual Spinner (Polymers)]].
image:FumehoodHotplate in C-1.jpg|Fume hood hotplate for [[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spinner_.28Polymers.29|Manual Spinner (Polymers)]] located in the fume hood in C-1.
image:FumehoodHotplate in E-5.jpg|Fumehood hotplate for [[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spinner_1|Manual Spinner 1]].
image:FumehoodHotplate in E-5.jpg|Fume hood hotplate for [[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spinner_1|Manual Spinner 1]] located in the fume hood in E-5.
image:KOH3 RR4 1.JPG|BHF in cleanroom D-3 (KOH bench 6".) The BHF bath is positioned to the right. This is primarily used to remove oxide before and after a KOH etch.  
image:KOH3 RR4 1.JPG|Fume hood hotplate (Si) for [[Specific_Process_Knowledge/Lithography/Coaters#Spin_coater:_Manual_Labspin|Spin coater: Manual Labspin]] located in the fume hood in A-5.  
image:Stinkskab RR2.jpg|PP-bath: positioned in the upper right corner of the fumehood in cleanroom B-1. </gallery>
image:Stinkskab RR2.jpg|Fume hood hotplate (III-V) for [[Specific_Process_Knowledge/Lithography/Coaters#Spin_coater:_Manual_Labspin|Spin coater: Manual Labspin]] located in the fume hood in A-5.
</gallery>
<br clear="all" />
<br clear="all" />


Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/Baking"