Specific Process Knowledge/Lithography/Baking: Difference between revisions
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<gallery caption="Fumehood hotplates" widths="220px" heights="225px" perrow="5"> | <gallery caption="Fumehood hotplates" widths="220px" heights="225px" perrow="5"> | ||
image: | image:FumehoodHotplate in C-1.jpg|Fumehood hotplate for [[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spinner_.28Polymers.29|Manual Spinner (Polymers)]]. | ||
image:KOH_4tommer.jpg|BHF in cleanroom C-1 (KOH bench 1+2.) The BHF bath is positioned between the two KOH baths. This is primarily used to remove oxide before and after a KOH etch. | image:KOH_4tommer.jpg|BHF in cleanroom C-1 (KOH bench 1+2.) The BHF bath is positioned between the two KOH baths. This is primarily used to remove oxide before and after a KOH etch. | ||
image:KOH3 RR4 1.JPG|BHF in cleanroom D-3 (KOH bench 6".) The BHF bath is positioned to the right. This is primarily used to remove oxide before and after a KOH etch. | image:KOH3 RR4 1.JPG|BHF in cleanroom D-3 (KOH bench 6".) The BHF bath is positioned to the right. This is primarily used to remove oxide before and after a KOH etch. | ||