Specific Process Knowledge/Lithography/Baking: Difference between revisions
| Line 21: | Line 21: | ||
!Purpose | !Purpose | ||
| | | | ||
Programmable contact bake | |||
Soft bake, PEB | |||
| | | | ||
Programmable, ramped contact bake | |||
Soft bake and PEB of SU-8 | |||
| | | | ||
Manual contact bake | |||
Soft bake | Soft bake | ||
| | | | ||
Manual convection bake | |||
Soft bake | Soft bake | ||
| | | | ||
Programmable, ramped convection bake | |||
Hard bake | Hard bake | ||
| | | | ||
Manual convection bake | |||
Dehydration | Dehydration | ||
|- | |- | ||