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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
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!Temperature
!Temperature
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hexamethyldisilazane (HMDS)
Maximum 120°C
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12%HF with Ammoniumflouride
Maximum 250°C
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none
Maximum 250°C
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Fixed 90°C
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120 - 250°C
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Fixed 250°C
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|-


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