Specific Process Knowledge/Etch/Etching of Gold: Difference between revisions
| Line 40: | Line 40: | ||
~100 nm/min | ~100 nm/min | ||
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~(??) nm/min | ~(??) nm/min - fast etch | ||
|- | |- | ||
|Batch size | |Batch size | ||
| Line 40: | Line 40: | ||
~100 nm/min | ~100 nm/min | ||
| | | | ||
~(??) nm/min | ~(??) nm/min - fast etch | ||
|- | |- | ||
|Batch size | |Batch size | ||