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Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions

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! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Physimeca|Physimeca]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Physimeca|Physimeca]])
! Sputter deposition ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]])
! Sputter deposition ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]])
! Sputter deposition ([[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/III-V Dielectric evaporator|III-V Dielectric evaporator]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/III-V Dielectric evaporator|III-V Dielectric evaporator]])
|-  
|-  
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|E-beam deposition of Titanium
|E-beam deposition of Titanium
|E-beam deposition of Titanium
|E-beam deposition of Titanium
|Sputter deposition of Titanium
|Sputter deposition of Titanium
|Sputter deposition of Titanium
|E-beam  deposition of Titanium
|E-beam  deposition of Titanium
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|RF Ar clean
|RF Ar clean
|
|
|RF Ar clean
|RF Ar clean
|RF Ar clean
| 
| 
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|10Å to 2000Å
|10Å to 2000Å
|10Å to 1000Å
|10Å to 1000Å
|.
|.
|.
|10Å to 1000Å
|10Å to 1000Å
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|About 10Å/s  
|About 10Å/s  
|Depending on process parameters, see [[Sputtering of Ti in Wordentec|here]].
|Depending on process parameters, see [[Sputtering of Ti in Wordentec|here]].
|Depending on process parameters, about 1 Å/s.
|About 1Å/s  
|About 1Å/s  
|-
|-
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*6x4" wafers or
*6x4" wafers or
*6x6" wafers
*6x6" wafers
|
* Smaller pieces
* Up to 1x6" wafers
|
|
* 2" wafer or
* 2" wafer or
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* III-V materials
* III-V materials
* Silicon wafers
* Quartz wafers
* Pyrex wafers
|
* Silicon wafers  
* Silicon wafers  
* Quartz wafers  
* Quartz wafers  
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* PMMA
* PMMA
* Mylar  
* Mylar  
|
* Silicon oxide
* Silicon (oxy)nitride
* Photoresist
* PMMA
* Mylar
* SU-8
* Metals
|
|
* Silicon oxide  
* Silicon oxide  
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|
|
|Only very thin layers (up to 100nm).
|Only very thin layers (up to 100nm).
|
|
|
|
|
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