Revision as of 15:18, 6 October 2014

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Direct Structure Definiton

By direct structure definition we mean that you form the structures for you device directly in the material that the device consist of without any masking steps. Some of the techniques may require a master.

Choose method of structuring/equipment

Materials for structuring

Polymers
- SU-8
  - UV Lithography
  - 2-Photon Polymerization Lithography
- Topas
- PMMA
  - Nano Imprint Lithography
  - Laser ablation
- AZ resists
  - UV Lithography
  - 2-Photon Polymerization Lithography
- ...
Metals/Silicon/Graphene
- Laser ablation
Glass

Comparison of equipment/material

	Nano Imprint Lithography	UV Lithography	2-Photon Polymerization Lithography	Polymer Injection Molder	Laser Micromachining Tool	Dicing saw
General description
Allowed materials	1	2	3	4	5	6
Sample sizes	1	2	3	4	5	6
Prerequisites	1	2	3	4	5	6
Pattern generation	1	2	3	4	5	6
Throughput	1	2	3	4	5	6
Min/max featuresize	1	2	3	4	5	6
Min/max aspect-ratio	1	2	3	4	5	6
Post-treatment	1	2	3	4	5	6
Patterning degree of freedom	1	2	3	4	5	6

@@ Line 19: / Line 19: @@
 *Polymers
 ** SU-8
+*** [[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]]
 *** [[Specific Process Knowledge/Lithography/3DLithography|2-Photon Polymerization Lithography]]
 ** Topas
@@ Line 28: / Line 29: @@
 *** [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser ablation]]
 ** AZ resists
+*** [[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]]
 *** [[Specific Process Knowledge/Lithography/3DLithography|2-Photon Polymerization Lithography]]
 ** ...