Specific Process Knowledge/Thermal Process/C1 Furnace Anneal-oxide: Difference between revisions
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==Process knowledge== | ==Process knowledge== | ||
*WET oxidation: with [[Specific Process Knowledge/Thermal Process/ C1 | *WET oxidation: with [[Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace|steamer]] | ||
*DRY oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page | *DRY oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page | ||
*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | *Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | ||