|
|
| Line 115: |
Line 115: |
| ! colspan="4" |Process A | | ! colspan="4" |Process A |
| |- | | |- |
| ! colspan="2" | Step 1 | | ! colspan="2" | Step 1: 11 cycles |
| ! colspan="2" | Step 2 | | ! colspan="2" | Step 2: 44 cycles |
| |-
| |
| ! width="120" | Parameter
| |
| ! width="120" | Etch
| |
| ! width="120" | Dep
| |
| ! width="120" | Etch
| |
| ! width="120" | Dep
| |
| |-
| |
| ! Gas flow (sccm)
| |
| | SF<sub>6</sub> 350 (1.5 s) 550
| |
| | C<sub>4</sub>F<sub>8</sub> 200
| |
| | SF<sub>6</sub> 350 (1.5 s) 550
| |
| | C<sub>4</sub>F<sub>8</sub> 200
| |
| |-
| |
| ! Cycle time (secs)
| |
| | 7.0
| |
| | 4.0
| |
| | 7.0
| |
| | 4.0
| |
| |-
| |
| ! Pressure (mtorr)
| |
| | 25 (1.5 s) 90 >> 150
| |
| | 25
| |
| | 25 (1.5 s) 150
| |
| | 25
| |
| |-
| |
| ! Coil power (W)
| |
| | 2800
| |
| | 2000
| |
| | 2800
| |
| | 2000
| |
| |-
| |
| ! Platen power (W)
| |
| | 120 >> 140 (1.5) 45
| |
| | 0
| |
| | 140 (1.5) 45
| |
| | 0
| |
| |-
| |
| ! Cycles
| |
| | colspan="2" | 11 (keep fixed)
| |
| | colspan="2" | 44 (vary this)
| |
| |-
| |
| ! Common
| |
| | colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers
| |
| |- | | |- |
| |} | | |} |
| Line 178: |
Line 135: |
| |} | | |} |
| |} | | |} |
|
| |
|
| |
|
| |
|
| == Process A guidelines == | | == Process A guidelines == |
