Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | ||
! rowspan="2" | | ! rowspan="2" | | ||
! colspan="4" |Process A | ! colspan="4" |Process A parameters | ||
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! colspan="2" | Step 1 | ! colspan="2" | Step 1 | ||