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Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions

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Jmli (talk | contribs)
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{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:500px"
{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:500px"
! rowspan="2" |  
! rowspan="2" |  
! colspan="4" |Process A  
! colspan="4" |Process A parameters
|-
|-
! colspan="2" | Step 1
! colspan="2" | Step 1