Specific Process Knowledge/Etch/DryEtchProcessing: Difference between revisions
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: In addition to the monitoring described above the data will be stored on the hard drive. This enables you to analyse the data afterwards. | : In addition to the monitoring described above the data will be stored on the hard drive. This enables you to analyse the data afterwards. | ||
; P - Processing: | ; P - Processing: | ||
: In addition to the monitoring and capturing of the data as described above, this mode will also feed an end point to the SPTS operator computer. It is, however, advised not to use this mode as it doesn't work for several reasons: | : In addition to the monitoring and capturing of the data as described above, this mode will also feed an end point to the SPTS operator computer. It is, however, advised not to use this mode as it doesn't work for several reasons: <ul> <li> It requires that an endpoint has been defined in the configuration file under 'Sequence' which is beyond the scope of this manual. </li><li> It requires that the etch recipe on the SPTS computer has been set up for it. </li></ul> | ||
=== Limitations === | === Limitations === | ||