Specific Process Knowledge/Etch/DryEtchProcessing: Difference between revisions

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 ; Graphs:
-: What plots to be displayed. Select
+: What plots to be displayed. Select <ul> <li> Spectral Graphs: This will show the spectrum (typically from 200 nm to 80 nm) of light during the process.</li> <li> Trend Graphs: Select which equations to be displayed. These graphs will enable you to monitor the development of the Peaks relevant for you as you etch your sample.</li> <li> Sequence, Reprocess and Properties: Beyond the scope of this manual </li> </ul>
-* Spectral Graphs: This will show the spectrum (typically from 200 nm to 80 nm) of light during the process.
-* Trend Graphs: Select which equations to be displayed. These graphs will enable you to monitor the development of the Peaks relevant for you as you etch your sample.
-*Sequence, Reprocess and Properties: Beyond the scope of this manual
 === Processing ===