Specific Process Knowledge/Etch/DryEtchProcessing: Difference between revisions
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; Equations: | ; Equations: | ||
: Determines what to do with the data from each region. Press Insert and select 'Region Equation'. Here, select | : Determines what to do with the data from each region. Press Insert and select 'Region Equation'. Here, select <ul> <li> Appropriate names and colors as with regions.</li> <li> Spectrum: Only one choice.</li> <li> Region according to name.</li> <li> Operation: Typically one will choose 'Max' to find the peak within each region, see image below. Other possibilities are Sum, Average, Min or Median. </li> </ul> | ||
; Snapshot: | ; Snapshot: | ||
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* Trend Graphs: Select which equations to be displayed. These graphs will enable you to monitor the development of the Peaks relevant for you as you etch your sample. | * Trend Graphs: Select which equations to be displayed. These graphs will enable you to monitor the development of the Peaks relevant for you as you etch your sample. | ||
*Sequence, Reprocess and Properties: Beyond the scope of this manual | *Sequence, Reprocess and Properties: Beyond the scope of this manual | ||
=== Processing === | === Processing === | ||