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Specific Process Knowledge/Etch/DryEtchProcessing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
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The configuration file has a number of headings:
The configuration file has a number of headings:
: Setup:  
; Setup:  
; Usually, one should not edit this. If, however, the process is longer than 10 minutes, you will have to extend the 10 minute time out.
: Usually, one should not edit this. If, however, the process is longer than 10 minutes, you will have to extend the 10 minute time out.


: Data Sources:  
; Data Sources:  
; There is only one possible input (the optical fiber) so do not edit this.
: There is only one possible input (the optical fiber) so do not edit this.


: Regions:  
; Regions:  
; Press Insert to add a region to monitor. Use an appropriate names and different colors for every region you add. For instance, call the 261.7 nm AlCl line  'AlCl_261' as name and the range og 261 to 262.5 nm, see image below. The range may be set in units of a half nanometer.
: Press Insert to add a region to monitor. Use an appropriate names and different colors for every region you add. For instance, call the 261.7 nm AlCl line  'AlCl_261' as name and the range og 261 to 262.5 nm, see image below. The range may be set in units of a half nanometer.


: Variables:  
; Variables:  
; Only for advanced configuration files. Do not edit.
: Only for advanced configuration files. Do not edit.
   
   
: Equations:  
; Equations:  
; Determines what to do with the data from each region. Press Insert and select 'Region Equation'. Here, select
: Determines what to do with the data from each region. Press Insert and select 'Region Equation'. Here, select
  * Appropriate names and colors as with regions.
  * Appropriate names and colors as with regions.
  * Spectrum: Only one choice
  * Spectrum: Only one choice
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  * Operation: Typically one will choose 'Max' to find the peak within each region, see image below. Other possibilities are Sum, Average, Min or Median.  
  * Operation: Typically one will choose 'Max' to find the peak within each region, see image below. Other possibilities are Sum, Average, Min or Median.  


: Snapshot:  
; Snapshot:  
; The possibility of taking snapshots of the whole spectrum after certain time - this is not necessary.
: The possibility of taking snapshots of the whole spectrum after certain time - this is not necessary.


: Graphs:  
; Graphs:  
; What plots to be displayed. Select
: What plots to be displayed. Select
  * Spectral Graphs: This will show the spectrum (typically from 200 nm to 80 nm) of light during the process.
  * Spectral Graphs: This will show the spectrum (typically from 200 nm to 80 nm) of light during the process.
  * Trend Graphs: Select which equations to be displayed. These graphs will enable you to monitor the development of the Peaks relevant for you as you etch your sample.
  * Trend Graphs: Select which equations to be displayed. These graphs will enable you to monitor the development of the Peaks relevant for you as you etch your sample.
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