Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace: Difference between revisions

Revision as of 13:43, 1 October 2014 view source Paphol (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 912 edits →Experimental setup (2) Steamer flow rate has been fixed at 10 liter/minutes ← Older edit		Revision as of 13:43, 1 October 2014 view source Paphol (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 912 edits →Results (2) Newer edit →
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	Figure 4 shows the oxide thickness as a function of oxidation time in three process temperatures. The oxide grows faster at the higher temperature. The prediction equations of each process temperature can be form by this plots, which are based on this experiment in our specific furnaces and give more accurate results. [[media:Calculation_for_Wet_oxidation_for_Anneal_Oxide(C1).xlsx\|'''Calculation for wet oxidation''']]		Figure 4 shows the oxide thickness as a function of oxidation time in three process temperatures. The oxide grows faster at the higher temperature. The prediction equations of each process temperature can be form by this plots, which are based on this experiment in our specific furnaces and give more accurate results. [[media:Calculation_for_Wet_oxidation_for_Anneal_Oxide(C1).xlsx\|'''Calculation for wet oxidation''']]


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