Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace: Difference between revisions
| Line 99: | Line 99: | ||
====Results (2)==== | ====Results (2)==== | ||
Figure 4 shows the oxide thickness as a function of oxidation time in three process temperatures. The oxide grows faster at the higher temperature. The prediction equations of each process temperature can be form by this plots. | Figure 4 shows the oxide thickness as a function of oxidation time in three process temperatures. The oxide grows faster at the higher temperature. The prediction equations of each process temperature can be form by this plots. [[media:Calculation_for_Wet_oxidation_for_Anneal_Oxide(C1).xlsx|'''Calculation for wet oxidation''']] | ||
''' | ''' | ||