Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace: Difference between revisions
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====Results (2)==== | ====Results (2)==== | ||
Figure 4 shows the oxide thickness as a function of oxidation time in three process temperatures. | Figure 4 shows the oxide thickness as a function of oxidation time in three process temperatures. The oxide grows faster at the higher temperature. The prediction equations of each process temperature can be form by this plots. | ||
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