Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace: Difference between revisions
| Line 37: | Line 37: | ||
====Results==== | ====Results==== | ||
''' | ''' | ||
[[image:Steamer_process_develop_fig1.png|527 × 324 px|middle|The average silicon dioxide thickness and the percent of film non-uniformity over the boat variation with process time, steamer flow rate and temperature.]] | |||