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==Process knowledge==
==Process knowledge==
*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page
*WET oxidation: with [[Specific Process Knowledge/Thermal Process/ C1 Furnace Anneal-oxide/steamer process develop|steamer]]
*DRY oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation|Oxidation]] page
*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page
*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page


==Overview of the performance of Anneal Oxide furnace and some process related parameters==
==Overview of the performance of Anneal Oxide furnace and some process related parameters==
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