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| |style="background:LightGrey; color:black"|Substrate size | | |style="background:LightGrey; color:black"|Substrate size |
| |style="background:WhiteSmoke; color:black"|Up to 6" | | |style="background:WhiteSmoke; color:black"|Up to 6" |
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| |style="background:silver; color:black"|
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| | style="background:LightGrey; color:black"|Substrate material allowed
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| |style="background:WhiteSmoke; color:black"|In principle all materials
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| ==An overview of the performance of the AFM Icon==
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| {| border="2" cellspacing="0" cellpadding="2"
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| !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
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| |style="background:WhiteSmoke; color:black"|<b>AFM Icon</b>
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime and electrical and mechanical measurements
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| |style="background:WhiteSmoke; color:black"|
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| *Surface roughness measurement
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| *Step/structure hight measurement
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| *Surface image
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| *Surface potential
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| *Modulus
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| *Adhesion
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| *Deformation
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| !style="background:silver; color:black" align="left"|Performance
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| |style="background:LightGrey; color:black"|Scan range xy
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| |style="background:WhiteSmoke; color:black"|Up to 90 µm square
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Scan range z
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| |style="background:WhiteSmoke; color:black"| Up to 13µm
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Vertical noise floor
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| |style="background:WhiteSmoke; color:black"|<30pm RMS
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|X-Y position noise (closed loop)
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| |style="background:WhiteSmoke; color:black"|<0.15nm RMS
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Z sensor noise level(closed loop)
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| |style="background:WhiteSmoke; color:black"|35pm RMS
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Integral nonlinearity(X-Y-Z)
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| |style="background:WhiteSmoke; color:black"|<0.5%
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|X-Y position noise (closed loop)
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| |style="background:WhiteSmoke; color:black"|<0.15nm RMS
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W
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| |style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe
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| !style="background:silver; color:black" align="left"|Hardware settings
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| |style="background:LightGrey; color:black"|Tip radius of curvature
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| |style="background:WhiteSmoke; color:black"|Standard probe: <12 nm
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Standard Cantilevers/tips
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| |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Super Sharp Si Cantilever/tip
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| |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-SSS-NCHR.html SSS-NCHR]
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|High Aspect Ratio Cantilever/tip
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| |style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]
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| |style="background:silver; color:black"|
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| |style="background:LightGrey; color:black"|Cantilevers/tips vendor
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| |style="background:WhiteSmoke; color:black"|
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| *[http://www.brukerafmprobes.com Bruker]
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| *[http://www.nanoandmore.com/home.php www.nanoandmore.com]
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| !style="background:silver; color:black" align="left"|Substrates
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| |style="background:LightGrey; color:black"|Substrate size
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| |style="background:WhiteSmoke; color:black"|Up to 210mm in diameter and up to 15mm thick"
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| !style="background:silver; color:black" align="left"|
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| |style="background:LightGrey; color:black"|Motorized stage (X-Y axis)
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| |style="background:WhiteSmoke; color:black"|
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| *180mmx150mm inspection area
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| *2µm repeatability, unidirectional
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| *3µm repeatability, bidirectional
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| |style="background:silver; color:black"| | | |style="background:silver; color:black"| |
