Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
| Line 11: | Line 11: | ||
| align="center" style="background:#f0f0f0;"|'''A1 Boron drive-in''' | | align="center" style="background:#f0f0f0;"|'''A1 Boron drive-in''' | ||
| align="center" style="background:#f0f0f0;"|'''A3 Phosphorous drive-in''' | | align="center" style="background:#f0f0f0;"|'''A3 Phosphorous drive-in''' | ||
| align=" | | align="cemter" style="background:#f0f0f0;"|'''C1 Gate oxide''' | ||
| align="center" style="background:#f0f0f0;"|'''C2 Anneal oxide''' | | align="center" style="background:#f0f0f0;"|'''C2 Anneal oxide''' | ||
| align="center" style="background:#f0f0f0;"|'''C3 Anneal bond''' | | align="center" style="background:#f0f0f0;"|'''C3 Anneal bond''' | ||