Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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Or you can install Brukers own software analyses program´that can be found here on the cleanroom drive: U:\DCH\CleanroomDrive\_Equipment\AFM\NanoScope_Ananlysis_x64_v150b53.exe | Or you can install Brukers own software analyses program´that can be found here on the cleanroom drive: U:\DCH\CleanroomDrive\_Equipment\AFM\NanoScope_Ananlysis_x64_v150b53.exe | ||
==An overview of the performance of the AFM | ==An overview of the performance of the AFM Icon== | ||
{| border="2" cellspacing="0" cellpadding="2" | {| border="2" cellspacing="0" cellpadding="2" | ||
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b> | |style="background:WhiteSmoke; color:black"|<b>AFM Icon</b> | ||
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!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||
|style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime | |style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime and electrical and mechanical measurements | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Surface roughness measurement | *Surface roughness measurement | ||
*Step/structure hight measurement | *Step/structure hight measurement | ||
*Surface image | *Surface image | ||
*Surface potential | |||
*Modulus | |||
*Adhesion | |||
*Deformation | |||
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left"|Performance | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Scan range z | |style="background:LightGrey; color:black"|Scan range z | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| Up to 13µm | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Vertical noise floor | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|<30pm RMS | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|X-Y position noise (closed loop) | ||
|style="background:WhiteSmoke; color:black"|< | |style="background:WhiteSmoke; color:black"|<0.15nm RMS | ||
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|style="background:silver; color:black"| | |||
|style="background:LightGrey; color:black"|Z sensor noise level(closed loop) | |||
|style="background:WhiteSmoke; color:black"|35pm RMS | |||
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|style="background:silver; color:black"| | |||
|style="background:LightGrey; color:black"|Integral nonlinearity(X-Y-Z) | |||
|style="background:WhiteSmoke; color:black"|<0.5% | |||
|- | |||
|style="background:silver; color:black"| | |||
|style="background:LightGrey; color:black"|X-Y position noise (closed loop) | |||
|style="background:WhiteSmoke; color:black"|<0.15nm RMS | |||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Cantilevers/tips vendor | |style="background:LightGrey; color:black"|Cantilevers/tips vendor | ||
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/home.php www.nanoandmore.com] | |style="background:WhiteSmoke; color:black"| | ||
*[http://www.brukerafmprobes.com Bruker] | |||
*[http://www.nanoandmore.com/home.php www.nanoandmore.com] | |||
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!style="background:silver; color:black" align="left"|Substrates | !style="background:silver; color:black" align="left"|Substrates | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black"|Up to | |style="background:WhiteSmoke; color:black"|Up to 210mm in diameter and up to 15mm thick" | ||
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!style="background:silver; color:black" align="left"| | |||
|style="background:LightGrey; color:black"|Motorized stage (X-Y axis) | |||
|style="background:WhiteSmoke; color:black"| | |||
*180mmx150mm inspection area | |||
*2µm repeatability, unidirectional | |||
*3µm repeatability, bidirectional | |||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||