Specific Process Knowledge/Etch/Wet Silicon Nitride Etch: Difference between revisions
| Line 13: | Line 13: | ||
===Nitride etch - key facts=== | ===Nitride etch - key facts=== | ||
{| border="1" cellspacing=" | {| border="1" cellspacing="1" cellpadding="4" align="left" | ||
! | ! | ||
! Nitride etch @ 180 <sup>o</sup>C | ! Nitride etch @ 180 <sup>o</sup>C | ||