Specific Process Knowledge/Thin film deposition: Difference between revisions
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*[[/Sputter coater#The_Hummer_Sputter_coater|Sputter coater Hummer]] - ''Gold sputtering system'' | *[[/Sputter coater#The_Hummer_Sputter_coater|Sputter coater Hummer]] - ''Gold sputtering system'' | ||
*[[/Sputter coater#The_Balzer_Sputter_coater|Balzer Sputter coater]] - ''Gold sputtering system'' | *[[/Sputter coater#The_Balzer_Sputter_coater|Balzer Sputter coater]] - ''Gold sputtering system'' | ||
*[[/III-V Dielectric evaporator|III-V Dielectric evaporator]] - ''E-beam evaporator tool'' | |||
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*[[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride|Furnace LPCVD Nitride (4" and 6")]] - ''Deposition of silicon nitride'' | *[[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride|Furnace LPCVD Nitride (4" and 6")]] - ''Deposition of silicon nitride'' | ||