Specific Process Knowledge/Thermal Process/C1 Furnace Anneal-oxide: Difference between revisions
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*N<sub>2</sub>: 0-10 slm | *N<sub>2</sub>: 0-10 slm | ||
*O<sub>2</sub>: 0-10 slm | *O<sub>2</sub>: 0-10 slm | ||
*Steamer flow : 0-25 liter/minute | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||