Specific Process Knowledge/Lithography/CSAR: Difference between revisions
| Line 352: | Line 352: | ||
|Fumehood D-3 | |Fumehood D-3 | ||
|'''Resist:''' AR-P 6200/2 diluted 1:1 in anisole (Bottled opened 16-06-2014 TIGRE) | |'''Resist:''' AR-P 6200/2 diluted 1:1 in anisole (Bottled opened 16-06-2014 TIGRE) | ||
| | |'''Resist:''' AR-P 6200/2 diluted 1:1 in anisole (Bottled opened 16-06-2014 TIGRE) | ||
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|Spin Coater LabSpin A-5 | |Spin Coater LabSpin A-5 | ||
|'''Spin:''' 1 min @ 6000 rpm,<br /> '''softbake:''' 1 min @ 150 degC, <br />'''thickness:''' ~50nm <br />(27-08-2014 TIGRE) | |'''Spin:''' 1 min @ 6000 rpm,<br /> '''softbake:''' 1 min @ 150 degC, <br />'''thickness:''' ~50nm <br />(27-08-2014 TIGRE) | ||
| | |'''Spin:''' 1 min @ 5000 rpm,<br /> '''softbake:''' 2 min @ 150 degC, <br />'''thickness:''' ~53nm <br />(16-06-2014 TIGRE) | ||
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|JEOL 9500 E-2 | |JEOL 9500 E-2 | ||
|'''Condition file:''' 0.2nA_ap5,<br /> '''doses:''' 180-420 muC/cm2,<br /> '''Shot pitch:''' 7-27 nm,<br /> '''PEC:''' no <br />(27-08-2014 TIGRE) | |'''Condition file:''' 0.2nA_ap5,<br /> '''doses:''' 180-420 muC/cm2,<br /> '''Shot pitch:''' 7-27 nm,<br /> '''PEC:''' no <br />(27-08-2014 TIGRE) | ||
| | |'''Condition file:''' 0.2nA_ap5,<br /> '''doses:''' 207-242 muC/cm2,<br /> '''Shot pitch:''' 5 nm,<br /> '''PEC:''' no <br />(02-07-2014 TIGRE) | ||
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| Line 374: | Line 374: | ||
|Develop | |Develop | ||
|Fumehood D-3 | |Fumehood D-3 | ||
|'''Developer:''' SX-AR 600-54/6,<br /> '''time:''' | |'''Developer:''' SX-AR 600-54/6,<br /> '''time:''' 30 sec,<br /> '''Rinse:''' 30 sec in IPA<br /> (28-08-2014 TIGRE) | ||
| | |'''Developer:''' SX-AR 600-54/6,<br /> '''time:''' 60 sec,<br /> '''Rinse:''' 30 sec in IPA<br /> (08-07-2014 TIGRE) | ||
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|Cressington 208HR, DTU CEN | |Cressington 208HR, DTU CEN | ||
|3-5 nm Pt, sputtering (29-08-2014 TIGRE) | |3-5 nm Pt, sputtering (29-08-2014 TIGRE) | ||
| | |3-5 nm Pt, sputtering (09-07-2014 TIGRE) | ||
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| Line 391: | Line 391: | ||
|Zeiss SEM Supra 60VP, D-3 | |Zeiss SEM Supra 60VP, D-3 | ||
|'''Acc voltage:''' 3 kV,<br /> '''WD:''' < 4mm, <br />conducting tape close to pattern (29-08-2014 TIGRE) | |'''Acc voltage:''' 3 kV,<br /> '''WD:''' < 4mm, <br />conducting tape close to pattern (29-08-2014 TIGRE) | ||
| | |'''Acc voltage:''' 3 kV,<br /> '''WD:''' < 4mm, <br />conducting tape close to pattern (09-07-2014 TIGRE) | ||
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