Specific Process Knowledge/Lithography/CSAR: Difference between revisions

@@ Line 358: / Line 358: @@
 |Spin Coat
 |Spin Coater LabSpin A-5
-|
+|'''Spin:''' 1 min @ 6000 rpm,<br /> '''softbake:''' 1 min @ 150 degC, <br />'''thickness:''' ~50nm (27-08-2014 TIGRE)
-'''Spin:''' 1 min @ 6000 rpm,
-'''softbake:''' 1 min @ 150 degC,
-'''thickness:''' ~50nm (27-08-2014 TIGRE)
 |
 |