Specific Process Knowledge/Lithography/CSAR: Difference between revisions

@@ Line 358: / Line 358: @@
 |Spin Coat
 |Spin Coater LabSpin A-5
-|'''Spin:''' 1 min @ 6000 rpm, '''acc:''' 2000 1/s2, '''softbake:''' 1 min @ 150 degC, '''thickness:''' ~50nm (27-08-2014 TIGRE)
+|'''Spin:''' 1 min @ 6000 rpm,
+'''acc:''' 2000 1/s2,
+'''softbake:''' 1 min @ 150 degC,
+'''thickness:''' ~50nm (27-08-2014 TIGRE)
 |
 |