Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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!colspan="7"|AllResist AR-P 6200/2 spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 09-04-2014. Softbake 5 min @ 150 degC. | |||
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!Equipment | !Equipment | ||
!Parameters | !colspan="3"|Parameters | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||