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Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions

Tigre (talk | contribs)
Tigre (talk | contribs)
Line 266: Line 266:
= Alignment of exposure to existing pattern on wafer =
= Alignment of exposure to existing pattern on wafer =


[[Image:P and Q marks.png|left|250px]]
[[Image:P and Q marks.png|right|250px]]


[[Image:GlobalMark.png|200px|thumb|Image:GlobalMark.png|200px|thumb|Text around the wafer mark is NOT recommended.]]


{| cellpadding="2" style="border: 1px solid darkgray;" align="right"
{| cellpadding="2" style="border: 1px solid darkgray;" align="right"
! width="140" | Correct
! width="150" |  
! width="150" | Not Correct
! width="150" |  
|- border="0"
|- border="0"
| [[File:mark example.png|120px]]
| [[File:mark example.png|120px]]
| [[File:GlobalMark.png|120px]]
| [[File:GlobalMark.png|120px]]
|- align="center"
|- align="center"
| Correct mark || not
| Correct mark || Text around mark not recommended
|}
|}