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Specific Process Knowledge/Etch/Wet Silicon Nitride Etch: Difference between revisions

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{| border="1" cellspacing="0" cellpadding="4" align="left"
{| border="1" cellspacing="0" cellpadding="4" align="left"
!  
!  
! Iodine based gold etch
! Nitride etch @ 180 <sup>o</sup>C
! Aqua Regia (Kongevand)
! Nitride etch @ 160 <sup>o</sup>C
|-  
|-  
|General description
|General description
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