Jump to content

Specific Process Knowledge/Lithography/CSAR: Difference between revisions

Tigre (talk | contribs)
Tigre (talk | contribs)
Line 547: Line 547:
|}
|}


{|class="wikitable collapsible collapsed" style="border: 5px solid black;"  style="width: 90%;" align="center"  
{|style="border: 5px solid black;"  style="width: 90%;" align="center"  
|-
|-
|-
|-
|-style="background:Black; color:White"  
|-style="background:Black; color:White" class="wikitable collapsible collapsed"  
!colspan="6"|Wafer 4.09, 50 nm exposed pattern, shot pitch 5 nm
!colspan="6"|Wafer 4.09, 50 nm exposed pattern, shot pitch 5 nm
|-
|-