Specific Process Knowledge/Lithography/CSAR: Difference between revisions
| Line 340: | Line 340: | ||
|Spin Coat | |Spin Coat | ||
|Spin Coater LabSpin A-5 | |Spin Coater LabSpin A-5 | ||
|1 min @ | |1 min @ 6000 rpm, 2000 1/s2, softbake 1 min @ 150 degC, thickness ~50nm | ||
|TIGRE | |TIGRE | ||
|- | |- | ||
| Line 457: | Line 457: | ||
|- | |- | ||
|} | |} | ||
=== 53 nm CSAR === | === 53 nm CSAR === | ||