Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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! Sample limitations | ! Sample limitations | ||
|| Vacuum compatible. | || Vacuum compatible. | ||
|| Vacuum compatible. The sample needs to be cut into small pieces. | || Vacuum compatible. The sample needs to be cut into small (app. 5*5 mm) pieces. | ||
|- | |- | ||
! Spatial resolution | ! Spatial resolution | ||