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Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

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[[image:EDX-scheme.jpg|300x300px|right|thumb|X-rays, with an energy that is characteristic of the atom they are emitted from, are created when the high energy electrons impinge on the sample. ]]
[[image:EDX-scheme.jpg|300x300px|right|thumb|The high energy electrons in the beam (denoted above as incident particle) collide with the core electrons of the sample atoms that are left in an excited state with higher energy. One decay mechanism is to let an outer electron fall into the unoccupied state under emission of a photon that carries the excess energy. This energy is determined by the electronic shells and hence characteristic of the atom.]]


You can make detailed analysis on the elemental composition and distribution in a sample with 3 instruments at Danchip. The [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/Leo|Leo SEM]] and [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/FEI|FEI SEM]] are both equipped with an X-ray detector that allows you to make elemental analysis by using the technique Energy Dispersive X-ray analysis or EDX. The [[Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry|Atomika SIMS]] uses a technique called Secondary Ion Mass Spectrometry or SIMS.
You can make detailed analysis on the elemental composition and distribution in a sample with 3 instruments at Danchip. The [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/Leo|Leo SEM]] and [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/FEI|FEI SEM]] are both equipped with an X-ray detector that allows you to make elemental analysis by using the technique Energy Dispersive X-ray analysis or EDX. The [[Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry|Atomika SIMS]] uses a technique called Secondary Ion Mass Spectrometry or SIMS.
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{| border="1" cellspacing="0" cellpadding="4" align="center"
{| border="1" cellspacing="0" cellpadding="4" align="center"
!width="100"|
!width="100"|
!width="200" | Energy Dispersive X-ray Analysis
!width="200" | SEM with EDX
!width="200" |Secondary Ion Mass Spectroscopy
!width="200" | SIMS
|-
! Full name
|| Energy Dispersive X-ray Analysis
|| Secondary Ion Mass Spectroscopy
|-  
|-  
!  Technique
!  Technique
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