Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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===Etch rates: Empirical formula (Seidl et al)=== | ===Etch rates: Empirical formula (Seidl et al)=== | ||
The folowing empirical formula can be used for concentrations in the range of 10-60 wt%: | |||
R = k<sub>0</sub> | |||