Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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~ | ~0.2 µm/min (70 <sup>o</sup>C) | ||
in p<math>sup ++</math> | |||
|- | |- | ||
|Batch size | |Batch size | ||
| Line 65: | Line 65: | ||
| | | | ||
~ | ~0.2 µm/min (70 <sup>o</sup>C) | ||
in p<math>sup ++</math> | |||
|- | |- | ||
|Batch size | |Batch size | ||