Specific Process Knowledge/Lithography/mrEBL6000: Difference between revisions
No edit summary |
No edit summary |
||
| Line 23: | Line 23: | ||
|[http://http://www.microresist.de/home_en.htm MicroResist] | |[http://http://www.microresist.de/home_en.htm MicroResist] | ||
|Standard negative resist | |Standard negative resist | ||
|[[media:mrEBL6000 | |[[media:mrEBL6000 Processing Guidelines.pdf|mrEBL6000 processing Guidelines.pdf]] | ||
|[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1 (Laurell)]], [[Specific_Process_Knowledge/Lithography/Coaters#Spin_coater:_Manual_Labspin|Spin Coater Labspin]] | |[[Specific_Process_Knowledge/Lithography/Coaters#Manual Spinner 1|Manual Spinner 1 (Laurell)]], [[Specific_Process_Knowledge/Lithography/Coaters#Spin_coater:_Manual_Labspin|Spin Coater Labspin]] | ||
|mr DEV | |mr DEV | ||