Specific Process Knowledge/Thin film deposition: Difference between revisions
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=== Other materials === | === Other materials === | ||
*Silicon Nitride | *[[Deposition of Silicon Nitride|Silicon Nitride]] | ||
*Silicon Oxide | *[[Deposition of Silicon Oxide|Silicon Oxide]] | ||
*PolySilicon | *[[Deposition of PolySilicon|PolySilicon]] | ||
== Choose deposition equipment == | == Choose deposition equipment == | ||