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| Line 422: |
Line 422: |
| | [[File:20nmShot10.png|230px]] | | | [[File:20nmShot10.png|230px]] |
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| |} | | |} |
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| '''20nm'''
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| {| cellpadding="2" style="border: 1px solid darkgray; width: 100px;"
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| ! dose [muC/cm2]
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| ! 207
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| ! 219
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| ! 230
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| ! 242
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| ! 253
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| ! ACHK
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| |-
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| |
| |
| | [[File:53nmCSAR20nmOverviewBasedose-10%.png]]
| |
| | [[File:53nmCSAR20nmOverviewBasedose-5%.png]]
| |
| | [[File:53nmCSAR20nmOverviewBasedose.png]]
| |
| | [[File:53nmCSAR20nmOverviewBasedose+5%.png]]
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| | [[File:53nmCSAR20nmOverviewBasedose+10%.png]]
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| |
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| |-
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| |
| | [[File:53nmCSAR20nmLinesBasedose.png]]
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| | [[File:53nmCSAR20nmLines2Basedose+5%.png]]
| |
| | [[File:53nmCSAR20nmLinesBasedose+10%.png]]
| |
| | [[File:20nmShot10.png]]
| |
| |-
| |
| |}
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