Specific Process Knowledge/Lithography/CSAR: Difference between revisions
Appearance
| Line 106: | Line 106: | ||
<span style="color:# | <span style="color:#696969">'''Dosepattern has been e-beam exposured and SEM inspected on those wafers marked by silver gray.'''</span> | ||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 40%" | {|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 40%" | ||