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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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== SEM pictures of dosepatterns ==
== SEM pictures of dosepatterns ==
<gallery>
Image:53nmCSAR30nmLinesBasedose+5%.png
Image:53nmCSAR30nmOverviewBasedose+5%.png
Image:53nmCSAR30nmLinesBasedose.png
Image:53nmCSAR30nmOverviewBasedose.png
Image:53nmCSAR30nmLinesBasedose-5%.png
Image:53nmCSAR30nmOverviewBasedose-5%.png
</gallery>


=== 53 nm CSAR ===
=== 53 nm CSAR ===
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{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable"
{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable"
! width="100" | dose [muC/cm2]
! width="100" | dose [muC/cm2]
! width="250" | 207
! width="250" | 219
! width="250" | 219
! width="250" | 230
! width="250" | 230
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|-  
|-  
|
|
| [[File:CSAR30nmoverview-10%.png|250px]]
| [[File:53nmCSAR30nmOverviewBasedose-5%.png|250px]]
| [[File:CSAR30nmoverview-5%.png|250px]]
| [[File:53nmCSAR30nmOverviewBasedose.png|250px]]
| [[File:CSAR30nmoverview.png|250px]]
| [[File:53nmCSAR30nmOverviewBasedose+5%.png|250px]]
| [[File:CSAR30nmoverview+5%.png|250px]]
|-  
|-  
|
|
| [[File:CSAR30nmlines-10%.png|250px]]
| [[File:53nmCSAR30nmLinesBasedose-5%.png|250px]]
| [[File:CSAR30nmlines-5%.png|250px]]
| [[File:53nmCSAR30nmLinesBasedose.png|250px]]
| [[File:CSAR30nmlines.png|250px]]
| [[File:53nmCSAR30nmLinesBasedose+5%.png|250px]]
| [[File:CSAR30nmlines+5%.png|250px]]


|}
|}
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