Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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== SEM pictures == | == SEM pictures == | ||
=== 53 nm CSAR === | |||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 30%;" | |||
|- | |||
|- | |||
|-style="background:Black; text-align:left; color:White" | |||
!Process | |||
!Parameters | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Resist | |||
|AR-P 6200/2 AllResist E-beam resist diluted 1:1 in anisole | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Spin Coat | |||
|1 min @ 5000 rpm, 4000 1/s2, softbake 2 min @ 150 degC, thickness ~140nm | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|E-beam exposure | |||
|0.2 nA, aperture 5, dose 207-242 muC/cm2, SHOT A,10 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Developing | |||
|SX-AR 600-54/6 60 sec, 60 sec IPA rinse | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Coated | |||
|3-5 nm Pt, sputtering | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Characterization | |||
|Zeiss SEM Supra 60VP, D-3, 09-07-2014, TIGRE | |||
|- | |||
|} | |||
'''50nm''' | |||
{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable" | |||
! width="100" | dose [muC/cm2] | |||
! width="250" | 207 | |||
! width="250" | 219 | |||
! width="250" | 230 | |||
! width="250" | 242 | |||
|- | |||
| | |||
| [[File:CSAR50nmoverview-10%.png|250px]] | |||
| [[File:CSAR50nmoverview-5%.png|250px]] | |||
| [[File:CSAR50nmoverview.png|250px]] | |||
| [[File:CSAR50nmoverview+5%.png|250px]] | |||
|- | |||
| | |||
| [[File:CSAR50nmlines-10%.png|250px]] | |||
| [[File:CSAR50nmlines-5%.png|250px]] | |||
| [[File:CSAR50nmlines.png|250px]] | |||
| [[File:CSAR50nmlines+5%.png|250px]] | |||
|} | |||
'''30nm''' | |||
{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable" | |||
! width="100" | dose [muC/cm2] | |||
! width="250" | 207 | |||
! width="250" | 219 | |||
! width="250" | 230 | |||
! width="250" | 242 | |||
|- | |||
| | |||
| [[File:CSAR30nmoverview-10%.png|250px]] | |||
| [[File:CSAR30nmoverview-5%.png|250px]] | |||
| [[File:CSAR30nmoverview.png|250px]] | |||
| [[File:CSAR30nmoverview+5%.png|250px]] | |||
|- | |||
| | |||
| [[File:CSAR30nmlines-10%.png|250px]] | |||
| [[File:CSAR30nmlines-5%.png|250px]] | |||
| [[File:CSAR30nmlines.png|250px]] | |||
| [[File:CSAR30nmlines+5%.png|250px]] | |||
|} | |||
'''20nm''' | |||
{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable" | |||
! width="100" | dose [muC/cm2] | |||
! width="250" | 230 | |||
! width="250" | 242 | |||
! width="250" | 253 | |||
|- | |||
| | |||
| [[File:CSAR20nmoverview.png|250px]] | |||
| [[File:CSAR20nmoverview+5%.png|250px]] | |||
| [[File:CSAR20nmoverview+10%.png|250px]] | |||
|- | |||
|} | |||
=== 140 nm CSAR === | === 140 nm CSAR === | ||