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Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions

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|-style="background:WhiteSmoke; text-align:center; color:black"
|-style="background:WhiteSmoke; text-align:center; color:black"
|Spin Coat
|Spin Coat
|colspan="2"|1 min @ 4000 rpm, 2000 1/s2, softbake 1 min @ 150 degC, thickness ~140nm
|colspan="2"|1 min @ 4000 rpm, softbake 2 min @ 150 degC, thickness ~140nm
|-
|-


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