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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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DCH-Employees-701
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|E-beam exposure
|E-beam exposure
|0.2 nA, aperture 5, dose 207-242 muC/cm2,  
|0.2 nA, aperture 5, dose 207-242 muC/cm2, SHOT A,10
|-
|-


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